Related Books
Language: en
Pages: 337
Pages: 337
Type: BOOK - Published: 2008-09-26 - Publisher: John Wiley & Sons
Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its univ
Language: en
Pages: 764
Pages: 764
Type: BOOK - Published: 2007-10-19 - Publisher: John Wiley & Sons
An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of pl
Language: en
Pages: 354
Pages: 354
Type: BOOK - Published: 1997 - Publisher: John Wiley & Sons
The concluding chapter describes post-CMP cleaning techniques, and most chapters feature problem sets to assist readers in developing a more practical understan
Language: en
Pages: 650
Pages: 650
Type: BOOK - Published: 2021-09-10 - Publisher: Woodhead Publishing
Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, hi
Language: en
Pages: 444
Pages: 444
Type: BOOK - Published: 2004-01-26 - Publisher: Springer Science & Business Media
This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor te
