Book of Donmon Teith

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applica

A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge mi

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific proc

This is an all-inclusive book on microelectromechanical systems (MEMS). The developments of MEMS and devices have been influential in the demonstration of new d

The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance an