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From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications
Language: en
Pages: 650
Authors: Marc J. Madou
Categories: TECHNOLOGY & ENGINEERING
Type: BOOK - Published: 2011 - Publisher: CRC Press

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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing
From MEMS to Bio-MEMS and Bio-NEMS
Language: en
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Authors: Marc J. Madou
Categories: Technology & Engineering
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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing
Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set
Language: en
Pages: 1992
Authors: Marc J. Madou
Categories: Technology & Engineering
Type: BOOK - Published: 2011-08-01 - Publisher: CRC Press

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Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised
Fundamentals of Microfabrication and Nanotechnology
Language: en
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Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Language: en
Pages: 1992
Authors: Marc J. Madou
Categories: Technology & Engineering
Type: BOOK - Published: 2018-12-14 - Publisher: CRC Press

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Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised