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Language: en
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Type: BOOK - Published: 2014-06-28 - Publisher: Academic Press
Ion Implantation and Beam Processing covers the scientific and technological advances in the fields of ion implantation and beam processing. The book discusses
Language: en
Pages: 271
Pages: 271
Type: BOOK - Published: 2007-05-16 - Publisher: Springer Science & Business Media
Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c
Language: en
Pages: 816
Pages: 816
Type: BOOK - Published: 1984 - Publisher: North Holland
Language: en
Pages: 400
Pages: 400
Type: BOOK - Published: 2013-11-27 - Publisher: Springer Science & Business Media
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo
Language: en
Pages: 425
Pages: 425
Type: BOOK - Published: 2012-12-13 - Publisher: Springer Science & Business Media
A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of