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Ion Implantation and Beam Processing
Language: en
Pages: 432
Authors: J. S. Williams
Categories: Technology & Engineering
Type: BOOK - Published: 2014-06-28 - Publisher: Academic Press

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Ion Implantation and Beam Processing covers the scientific and technological advances in the fields of ion implantation and beam processing. The book discusses
Ion Implantation and Synthesis of Materials
Language: en
Pages: 271
Authors: Michael Nastasi
Categories: Science
Type: BOOK - Published: 2007-05-16 - Publisher: Springer Science & Business Media

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Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c
Ion Implantation and Ion Beam Processing of Materials
Language: en
Pages: 816
Authors: G. K. Hubler
Categories: Science
Type: BOOK - Published: 1984 - Publisher: North Holland

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Ion Implantation: Basics to Device Fabrication
Language: en
Pages: 400
Authors: Emanuele Rimini
Categories: Technology & Engineering
Type: BOOK - Published: 2013-11-27 - Publisher: Springer Science & Business Media

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Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo
Ion Beams in Materials Processing and Analysis
Language: en
Pages: 425
Authors: Bernd Schmidt
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-13 - Publisher: Springer Science & Business Media

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A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of