Download or read book Fast Simulation of Electro-Thermal MEMS written by Tamara Bechtold and published by Springer Science & Business Media. This book was released on 2006-11-01 with total page 185 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.