Chemistry of Atomic Layer Deposition

Chemistry of Atomic Layer Deposition
Author :
Publisher : Walter de Gruyter GmbH & Co KG
Total Pages : 113
Release :
ISBN-10 : 9783110712537
ISBN-13 : 3110712539
Rating : 4/5 (539 Downloads)

Book Synopsis Chemistry of Atomic Layer Deposition by : Seán Thomas Barry

Download or read book Chemistry of Atomic Layer Deposition written by Seán Thomas Barry and published by Walter de Gruyter GmbH & Co KG. This book was released on 2021-11-08 with total page 113 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.


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