Download or read book Modelling of Microfabrication Systems written by Raja Nassar and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 276 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.