Download or read book New Prospects of Integrating Low Substrate Temperatures with Scaling-Sustained Device Architectural Innovation written by Nabil Shovon Ashraf and published by Springer Nature. This book was released on 2022-06-01 with total page 72 pages. Available in PDF, EPUB and Kindle. Book excerpt: In order to sustain Moore's Law-based device scaling, principal attention has focused on toward device architectural innovations for improved device performance as per ITRS projections for technology nodes up to 10 nm. Efficient integration of lower substrate temperatures (