Download or read book Next Generation Micro/Nano Systems written by Pietro Vincenzini and published by Trans Tech Publications Ltd. This book was released on 2012-09-11 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 15 peer-reviewed papers collected here together offer a plenitude of up-to-date information on “Next Generation Micro/Nano Systems”. Volume is indexed by Thomson Reuters CPCI-S (WoS). The papers are conveniently arranged into: Chapter 1: Physical, Chemical and Optical MEMS, Chapter 2: Radiofrequency MEMS, Chapter 3: Micro/Nano Fluidics.