Spectroscopic Ellipsometry and Reflectometry

Spectroscopic Ellipsometry and Reflectometry
Author :
Publisher : Wiley-Interscience
Total Pages : 0
Release :
ISBN-10 : 0471181722
ISBN-13 : 9780471181729
Rating : 4/5 (729 Downloads)

Book Synopsis Spectroscopic Ellipsometry and Reflectometry by : Harland G. Tompkins

Download or read book Spectroscopic Ellipsometry and Reflectometry written by Harland G. Tompkins and published by Wiley-Interscience. This book was released on 1999-03-18 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.


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