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ULSI Process Integration 5
Language: en
Pages: 509
Authors: Cor L. Claeys
Categories: Integrated circuits
Type: BOOK - Published: 2007 - Publisher: The Electrochemical Society

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The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond
ULSI Process Integration 6
Language: en
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Type: BOOK - Published: 2009-09 - Publisher: The Electrochemical Society

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ULSI Process Integration 6 covers all aspects of process integration. Sections are devoted to 1) Device Technologies, 2) Front-end-of-line integration (gate sta
ULSI Process Integration
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Authors: Cor L. Claeys
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Type: BOOK - Published: 1999 - Publisher: The Electrochemical Society

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ULSI Process Integration 9
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ULSI Process Integration 7
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